15 July 1994 Producibility advances in hybrid uncooled infrared detectors
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Abstract
Several key process developments advance the state-of-the-art in hybrid, uncooled IR detector fabrication. Following a four year producibility roadmap, ion mill reticulation, wafer processing, and standard semiconductor processes are nearing implementation. The discussion describes several proof-of-principle experiments and their results and contrasts the current process approach against an existing, detailed process model. As the thrust continues towards low cost, high volume production, emphasis remains on simultaneous performance improvements. The analyses and preliminary data show that both moderate performance and low detector cost are quite obtainable with the strategies identified.
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Robert A. Owen, Robert A. Owen, James F. Belcher, James F. Belcher, Howard R. Beratan, Howard R. Beratan, Steve N. Frank, Steve N. Frank, } "Producibility advances in hybrid uncooled infrared detectors", Proc. SPIE 2225, Infrared Detectors and Focal Plane Arrays III, (15 July 1994); doi: 10.1117/12.179686; https://doi.org/10.1117/12.179686
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