17 June 1994 Integrated silica-based optical switch for radar phase control
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The development of low-loss, low-cost integrated optical switches is critical for radar phase control applications. We report recent progress in integrated phosphorous-doped SiO2 on Si (PSG) waveguide optical routing switches based on electro-static actuation of an aluminum membrane. We have demonstrated the membrane switching concept and its implementation feasibility with a Mach-Zehnder interferometer and a deposited aluminum thin film. Without the metal film, 95% of the output light was measured in the cross channel, with a channel crosstalk of -13.37 dB. With a 3 mm long aluminum film being deposited on one of the interferometer arms as a phase shifter, 94% of the output light was measured in bar channel. The switch structure is currently being optimized for better performance, and a deformable aluminum membrane switch is being developed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lily Y. Pang, Jerry L. Leonard, Gregory A. Magel, Susan Marie Eshelman, Tseng-Hwang Lin, "Integrated silica-based optical switch for radar phase control", Proc. SPIE 2236, Transition of Optical Processing into Systems 1994, (17 June 1994); doi: 10.1117/12.178054; https://doi.org/10.1117/12.178054


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