17 June 1994 Integrated silica-based optical switch for radar phase control
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The development of low-loss, low-cost integrated optical switches is critical for radar phase control applications. We report recent progress in integrated phosphorous-doped SiO2 on Si (PSG) waveguide optical routing switches based on electro-static actuation of an aluminum membrane. We have demonstrated the membrane switching concept and its implementation feasibility with a Mach-Zehnder interferometer and a deposited aluminum thin film. Without the metal film, 95% of the output light was measured in the cross channel, with a channel crosstalk of -13.37 dB. With a 3 mm long aluminum film being deposited on one of the interferometer arms as a phase shifter, 94% of the output light was measured in bar channel. The switch structure is currently being optimized for better performance, and a deformable aluminum membrane switch is being developed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lily Y. Pang, Lily Y. Pang, Jerry L. Leonard, Jerry L. Leonard, Gregory A. Magel, Gregory A. Magel, Susan Marie Eshelman, Susan Marie Eshelman, Tseng-Hwang Lin, Tseng-Hwang Lin, } "Integrated silica-based optical switch for radar phase control", Proc. SPIE 2236, Transition of Optical Processing into Systems 1994, (17 June 1994); doi: 10.1117/12.178054; https://doi.org/10.1117/12.178054


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