8 July 1994 Object retrieval from the image of textured polycrystalline silicon captured by confocal scanning laser microscope
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Abstract
Confocal scanning laser microscopy is a powerful tool for nondestructive investigations. We introduce it to characterize active semiconductor devices. Due to the high resolution of this type of optical microscope, objects are identified with dimensions less than 0.1 micrometers . At this range, the fundamental physical concepts prevent readable images with conventional microscopes. In fact, at these dimensions the diffraction becomes very effective, so that we obtain a noncomprehensible pattern unless we numerically process it. In order to get a readout of the detected signal we use, instead of the deconvolution or Fourier Transforms, a direct method that consists of an explicit calculation of the electrical field of the electromagnetic wave. The amplitude is calculated in all functional planes of the microscope: from the laser source to the object and from this to the CCD camera. We focused our attention on polycrystalline silicon textures and roughness obtained after an anisotropic etching.
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Abdennaceur Karoui, Abdennaceur Karoui, M. Bouaicha, M. Bouaicha, R. Bennaceur, R. Bennaceur, } "Object retrieval from the image of textured polycrystalline silicon captured by confocal scanning laser microscope", Proc. SPIE 2241, Inverse Optics III, (8 July 1994); doi: 10.1117/12.179735; https://doi.org/10.1117/12.179735
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