Absolute surface shape testing by means of an interferometric sensor

Karl-Edmund Elssner; Andreas Vogel; Thomas Bluemel; Ricarda Kafka

doi:10.1117/12.194315

15 November 1994 Absolute surface shape testing by means of an interferometric sensor

Karl-Edmund Elssner, Andreas Vogel, Thomas Bluemel, Ricarda Kafka

Proceedings Volume 2248, Optical Measurements and Sensors for the Process Industries; (1994) https://doi.org/10.1117/12.194315
Event: Optics for Productivity in Manufacturing, 1994, Frankfurt, Germany

Abstract

Testing of surface shapes by automatic interferometry is exact, quick, and comfortable, and therefore popular. It, however, suffers from drawbacks: The equipment is often quite voluminous and not exactly cheap, and the attainable accuracy is limited by the precision of the reference surface (relative testing). In cooperation with Fisba Optik AG we recently developed a matchbox-sized, cost-reduced interferometric surface shape sensor to overcome the first drawback. Furthermore we combined this sensor with methods for absolute calibration of the sensor or a reference surface resp. to clear the reference surface handicap. Absolute calibration methods are methods which measure surfaces independently from others with sufficient accuracy as compared to an ideal mathematical surface. We adapted our own developments of absolute flatness and sphericity testing for the surface shape inspection sensor. Further on we developed and adapted new methods for absolute cylindricity testing the importance of which is increasing as the usage of cylindrical surfaces of higher and certificated accuracy is rising.

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Karl-Edmund Elssner, Andreas Vogel, Thomas Bluemel, and Ricarda Kafka "Absolute surface shape testing by means of an interferometric sensor", Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); https://doi.org/10.1117/12.194315

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KEYWORDS

Sensors

Calibration

Interferometry

Interferometers

Error analysis

Spherical lenses

Mirrors

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