15 November 1994 Computer-controlled high-accuracy optical measurement
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Proceedings Volume 2248, Optical Measurements and Sensors for the Process Industries; (1994) https://doi.org/10.1117/12.194341
Event: Optics for Productivity in Manufacturing, 1994, Frankfurt, Germany
Abstract
In measurements which are influenced by external parameters, computer control and automation can help to improve the accuracy. This is also true of basically optical measurement set-ups such as certain interferometers for measuring flatness or wavefront aberrations, or set-ups for measuring the optical transfer function of lenses, for example. For the latter, a critical external parameter is the temperature variation resulting in expansion and therefore defocusing effects. New developments and measurement principles leading to improved accuracy are discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Schulz, Michael Schulz, } "Computer-controlled high-accuracy optical measurement", Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); doi: 10.1117/12.194341; https://doi.org/10.1117/12.194341
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