15 November 1994 Optical methods for the characterization of mechanical properties of thin silicon films
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Proceedings Volume 2248, Optical Measurements and Sensors for the Process Industries; (1994); doi: 10.1117/12.194321
Event: Optics for Productivity in Manufacturing, 1994, Frankfurt, Germany
Abstract
Holographic interferometry and contouring are two optical methods used for the characterization of mechanical properties of thin films. Therefore, a phase measurement interferometry applied to these methods is explained. These solutions are discussed in terms of accuracy and sensibility. An application on a bulge test is proposed and experimental results are compared with finite element calculation. In each case, the good agreement between theory and experience allows us to validate the apparatus.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gilbert M. Tribillon, Bertrand Trolard, Patrick Delobelle, Eric Bonnotte, Luc Bornier, "Optical methods for the characterization of mechanical properties of thin silicon films", Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); doi: 10.1117/12.194321; https://doi.org/10.1117/12.194321
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KEYWORDS
Holographic interferometry

Silicon

Crystals

Error analysis

Phase measurement

Silicon films

Mirrors

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