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15 November 1994 Surface profiling by frequency-domain analysis of white light interferograms
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Proceedings Volume 2248, Optical Measurements and Sensors for the Process Industries; (1994) https://doi.org/10.1117/12.194308
Event: Optics for Productivity in Manufacturing, 1994, Frankfurt, Germany
Abstract
Three-dimensional imaging interferometric microscopes have outstanding accuracy, provided of course that the test objects are sufficiently smooth and continuous. The present study shows that a white-light source and spatial-frequency domain analysis of the resulting interferograms can dramatically increase the range of application of interferometric surface profilers. This analysis breaks the white light up into its constituent colors and makes it possible to apply multiple-wavelength techniques to the problem of surface height measurement.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter J. de Groot and Leslie L. Deck "Surface profiling by frequency-domain analysis of white light interferograms", Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); https://doi.org/10.1117/12.194308
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