1 January 1994 Investigation of ch-plasma with using of microwave spectrometer
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Proceedings Volume 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994; 22500O (1994) https://doi.org/10.1117/12.2303041
Event: Millimeter and Submillimeter Waves and Applications: International Conference, 1994, San Diego, CA, United States
Abstract
The microwave spectrometer on coherence spontaneous radiation effect (CSR — spectrometer) in millimeter wavelength range was used for analysis of diamond films deposition products. Investigation of dynamic characteristics CH — plasma components in reactor in situ was realized.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. D. Akhsakhaljan, A. D. Akhsakhaljan, } "Investigation of ch-plasma with using of microwave spectrometer", Proc. SPIE 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994, 22500O (1 January 1994); doi: 10.1117/12.2303041; https://doi.org/10.1117/12.2303041
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