1 January 1994 Quasi-optical instrument for thickness measurements
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Proceedings Volume 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994; 22505T (1994) https://doi.org/10.1117/12.2303226
Event: Millimeter and Submillimeter Waves and Applications: International Conference, 1994, San Diego, CA, United States
Abstract
Two schemes of the thickness gauges of metal and dielectric sheets are discussed in this report. We suggest to use quasi-optical Barrel-Shaped open resonator (BOR) specially designed as high-accuracy thickness sensor for thin metal sheets and two channel interferometer with the consecutive round of both sides of the metal sheet and modulator in the reference channel.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. A. Vertiy, A. A. Vertiy, } "Quasi-optical instrument for thickness measurements", Proc. SPIE 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994, 22505T (1 January 1994); doi: 10.1117/12.2303226; https://doi.org/10.1117/12.2303226
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