1 March 1994 Double heterodyne interferometry for high-precision distance measurements
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Proceedings Volume 2252, Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics; (1994) https://doi.org/10.1117/12.169861
Event: Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics, 1993, Zurich, Switzerland
Abstract
We present a double-heterodyne interferometer for absolute distance measurements at rough surfaces up to 100 meters. The two wavelengths are generated by frequency shifting the light of a monomode laser diode using a 500 MHz acousto-optic modulator. The synthetic wavelength obtained is (Lambda) equals 60 cm. In order to yield unambiguity up to 100 meter distance two measurements have to be taken using slightly different frequency shifts of 500 resp. 501.5 MHz. Measurements showing a resolution of 0.1 mm are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. Dalhoff, E. Dalhoff, Edgar W. Fischer, Edgar W. Fischer, S. Heim, S. Heim, Hans J. Tiziani, Hans J. Tiziani, } "Double heterodyne interferometry for high-precision distance measurements", Proc. SPIE 2252, Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics, (1 March 1994); doi: 10.1117/12.169861; https://doi.org/10.1117/12.169861
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