Paper
4 November 1994 Damage testing and characterization of dielectric coatings for high-power excimer lasers
Klaus R. Mann, Eric Eva, A. Hopfmueller
Author Affiliations +
Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192150
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France
Abstract
Damage threshold and absorptivity measurements on dielectric coatings for high power excimer lasers are presented in this paper. The experimental techniques applied are in accordance with respective ISO standards. In particular, we give a detailed description of a newly developed UV laser calorimeter which allows high precision determination of absorptivities for transmissive and reflective UV optical components. The measured dependence of the damage data on the laser pulse length and shape as well as the correlation between damage thresholds and absorptivities observed for high reflection coatings indicate that the thermal model for laser induced breakdown is still valid for 248 nm radiation in the nanosecond pulse length regime.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Klaus R. Mann, Eric Eva, and A. Hopfmueller "Damage testing and characterization of dielectric coatings for high-power excimer lasers", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192150
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Cited by 2 scholarly publications.
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KEYWORDS
Laser damage threshold

Excimer lasers

Dielectrics

Absorption

Pulsed laser operation

Optical coatings

Laser induced damage

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