Design and fabrication of IR filters with good flatness

Anmin Zheng; Alan Whatley

doi:10.1117/12.192083

4 November 1994 Design and fabrication of IR filters with good flatness

Anmin Zheng, Alan Whatley

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Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192083
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Stresses of single and multilayer films in the range of 5 to 40 micrometers are discussed together with their spectral performance. The flatness of a substrate after coating can be less than 4 fringes (2 (lambda) ), even 1 fringe at 0.5875 micrometers . The thermal evaporated thin film materials are II_B - VI compounds (II_B being Zn etc. and VI being S and Se etc. in the periodic table), and PbTe or Ge.

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Anmin Zheng, Anmin Zheng, Alan Whatley, Alan Whatley, } "Design and fabrication of IR filters with good flatness", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192083; https://doi.org/10.1117/12.192083

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