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4 November 1994 Glancing-incidence x-ray scattering by multilayers for XUV mirrors
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Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192078
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France
Abstract
Periodic Mo/Si multilayers designed for X-UV mirrors were made by ion beam sputtering deposition on float-glass, polished borosilicate glass and superpolished silicon substrates. Glancing incidence X-ray scattering from these multilayers was measured at first by fixing the incidence angle and varying the detection angle, and then by simultaneously varying the incidence and detection angles in such a way that the phase difference between the beams scattered by successive layers was kept constant. Based on the polarization distribution theory, a calculation of X-ray scattering from interface roughness accounts for the typical features observed on the experimental curves.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean-Pierre Chauvineau, Y. Chambet, and C. Marliere "Glancing-incidence x-ray scattering by multilayers for XUV mirrors", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192078
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