4 November 1994 Low-loss ion beam sputtered coatings in the nineties
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Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192110
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France
Dielectric coatings of ultra-low optical loss has been improved by using ion beam sputtering for more than three orders of magnitude within the last two decades. Its fabrication method and kinetic mechanisms are reviewed, and a physical model for the sputtering deposition is described. The manufacture trends and application areas in the 1990s are analyzed and some basic questions are answered.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David T. Wei, "Low-loss ion beam sputtered coatings in the nineties", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192110; https://doi.org/10.1117/12.192110


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