4 November 1994 Low-loss ion beam sputtered coatings in the nineties
Author Affiliations +
Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192110
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France
Dielectric coatings of ultra-low optical loss has been improved by using ion beam sputtering for more than three orders of magnitude within the last two decades. Its fabrication method and kinetic mechanisms are reviewed, and a physical model for the sputtering deposition is described. The manufacture trends and application areas in the 1990s are analyzed and some basic questions are answered.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David T. Wei, David T. Wei, } "Low-loss ion beam sputtered coatings in the nineties", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192110; https://doi.org/10.1117/12.192110


Ion air gun cleaning of substrates prior to thin film...
Proceedings of SPIE (August 19 2005)
Durable coatings for large segmented mirrors
Proceedings of SPIE (September 23 2004)
Initial capability of new photomask-blank deposition tool
Proceedings of SPIE (August 27 2003)
Plasma and optical thin film technologies
Proceedings of SPIE (October 04 2011)

Back to Top