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4 November 1994 New source of energetic neutral particles
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Proceedings Volume 2253, Optical Interference Coatings; (1994)
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France
We present a new tool for coating technology. Based on the known saddle field source we developed an improved neutral particle source for particle energies equivalent up to a few hundred eV. The desired energy can be selected by the operation mode. The energetic particles are neutrals. Therefore no problems arise with electric charging or with electrically caused absorption. The principal construction of the source is described. The main advantages are: no filament, no magnetic field, only dc high voltage, resistant to reactive gases.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hermann R. Dobler "New source of energetic neutral particles", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994);

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