Optical analysis of complex multilayer structures using multiple data types

Blaine D. Johs; Roger H. French; Franklin D. Kalk; William A. McGahan; John A. Woollam

doi:10.1117/12.192054

4 November 1994 Optical analysis of complex multilayer structures using multiple data types

Blaine D. Johs; Roger H. French; Franklin D. Kalk; William A. McGahan; John A. Woollam

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Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192054
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Variable angle of incidence spectroscopic ellipsometry (VASE) is commonly used for multilayer optical analysis, but in some cases this experiment (performed in reflection) does not provide sufficient information for the unique determination of the thicknesses and optical constants of the films in the given multilayer. We have found that augmenting the VASE data with data from other optical experiments greatly increases the amount of information which can be obtained for multilayers, particularly when they are deposited on transparent substrates. In this work, we describe a formalism which allows us to quantitatively characterize complex multilayer structures by using combined reflection and transmission ellipsometry, reflection ellipsometry with the sample flipped over, and intensity transmission measurements. To demonstrate the usefulness of this capability, the analysis of a complex graded, absorbing thin film structure (a Cr-based phase-shifting photomask blank), is presented.

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Blaine D. Johs, Blaine D. Johs, Roger H. French, Roger H. French, Franklin D. Kalk, Franklin D. Kalk, William A. McGahan, William A. McGahan, John A. Woollam, John A. Woollam, } "Optical analysis of complex multilayer structures using multiple data types", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192054; https://doi.org/10.1117/12.192054

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