Structural and chemical properties of thin films (Al2O3, ZrO2, BN) and multicomponent films (ZrO2, Ti) deposited by pulsed laser deposition

Ernst-Wolfgang Kreutz; Mirka Alunovic; A. Voss; Wilhelm Pfleging; H. Sung; David A. Wesner

doi:10.1117/12.192125

4 November 1994 Structural and chemical properties of thin films (Al₂O₃, ZrO₂, BN) and multicomponent films (ZrO₂, Ti) deposited by pulsed laser deposition

Ernst-Wolfgang Kreutz, Mirka Alunovic, A. Voss, Wilhelm Pfleging, H. Sung, David A. Wesner

Author Affiliations +

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192125
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Single-component films of ceramic materials (Al₂O₃, ZrO₂, BN) as well as multi- component films and films with controlled inhomogeneity (ZrO₂, Ti) were deposited at different laser parameters (wavelength, fluence, mode of operation) and processing variables (processing gas pressure and composition, rf bias, target-substrate distance). The investigations include microbalance measurements of the weight loss of the target as a measure of mass removal as well as high-speed photography and emission spectroscopy as a measure of geometry, dynamics and excitation of the vapor/plasma state generated. The morphology, structure and composition of the films were investigated by SEM, XPS, AES and SAM, revealing a broad variety of different film properties useful for applications. Al₂O₃ films deposited with pulsed CO₂ and excimer laser radiation are dense and glassy. ZrO₂ films deposited with CO₂ laser radiation show columnar structures. BN films deposited with excimer laser radiation consist of hexagonal BN crystallites embedded in an amorphous matrix. Thin films produced with excimer laser radiation show a nearly flat and defect free surface allowing the construction of multilayer systems and graded or homogeneous doped layers.

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Ernst-Wolfgang Kreutz, Mirka Alunovic, A. Voss, Wilhelm Pfleging, H. Sung, and David A. Wesner "Structural and chemical properties of thin films (Al₂O₃, ZrO₂, BN) and multicomponent films (ZrO₂, Ti) deposited by pulsed laser deposition", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192125

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KEYWORDS

Particles

Titanium

Laser processing

Zirconium dioxide

Excimer lasers

Thin films

Ceramics

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