Phase measurement system with transmitted UV light for phase-shifting mask inspection

Haruhiko Kusunose; Hiroyuki Nakae; Junji Miyazaki; Nobuyuki Yoshioka; Hiroaki Morimoto; Keiichi Murayama; Katsuhiro Tsukamoto

doi:10.1117/12.191941

3 November 1994 Phase measurement system with transmitted UV light for phase-shifting mask inspection

Haruhiko Kusunose, Hiroyuki Nakae, Junji Miyazaki, Nobuyuki Yoshioka, Hiroaki Morimoto, Keiichi Murayama, Katsuhiro Tsukamoto

Author Affiliations +

Proceedings Volume 2254, Photomask and X-Ray Mask Technology; (1994) https://doi.org/10.1117/12.191941
Event: Photomask Japan '94, 1994, Kawasaki City, Kanagawa, Japan

Abstract

This paper describes a direct phase measurement system with transmitted UV-light for phase shifting mask (PSM) inspection using a shearing interferometer microscope. Measurements were made with 365 nm monochromatic light of mercury arc lamp. The accuracy of this system is sufficient for the application for phase shifting mask inspection. The measurement results are in good agreement with the calculation based on quartz step height measurement and refractive index. Wafer exposure results of attenuating-type PSM also agree with the phase measurement results.

Citation Download Citation

Haruhiko Kusunose, Hiroyuki Nakae, Junji Miyazaki, Nobuyuki Yoshioka, Hiroaki Morimoto, Keiichi Murayama, and Katsuhiro Tsukamoto "Phase measurement system with transmitted UV light for phase-shifting mask inspection", Proc. SPIE 2254, Photomask and X-Ray Mask Technology, (3 November 1994); https://doi.org/10.1117/12.191941

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