Plasma flare of pulsed-microwave surface discharge in vacuum for thin film deposition and materials processing

Alexander A. Ravaev; Alexander V. Medvedovsky; Pavel S. Chernyshev

doi:10.1117/12.174599

1 May 1994 Plasma flare of pulsed-microwave surface discharge in vacuum for thin film deposition and materials processing

Alexander A. Ravaev, Alexander V. Medvedovsky, Pavel S. Chernyshev

Author Affiliations +

Proceedings Volume 2259, XVI International Symposium on Discharges and Electrical Insulation in Vacuum; (1994) https://doi.org/10.1117/12.174599
Event: XVI International Symposium on Discharges and Electrical Insulation in Vacuum, 1994, Moscow-St. Petersburg, Russian Federation

Abstract

The present report consists of three parts. The first one is a brief review of experimental works accomplished in MRT Institute and devoted to a study of nonlinear interaction of strong microwaves (in X-band at intensities of 0.01 - 10 MW/cm² and pulse duration from 50 - 100 nsec up to 1 - 10 microseconds) with a plasma flare, and of attendant physical processes. The small experimental plasma reactor bench is described in the second part. And the third part of our report reflects the first qualitative experiments on pulsed microwave deposition of thin carbon and metal films on various substrates. Obtained practical results and technique perspectives are discussed in detail.

Citation Download Citation

Alexander A. Ravaev, Alexander V. Medvedovsky, and Pavel S. Chernyshev "Plasma flare of pulsed-microwave surface discharge in vacuum for thin film deposition and materials processing", Proc. SPIE 2259, XVI International Symposium on Discharges and Electrical Insulation in Vacuum, (1 May 1994); https://doi.org/10.1117/12.174599

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available