7 October 1994 Accuracy and repeatability results of OMNISCATRTM: a high-speed, high-resolution three-dimensional scatterometer
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Abstract
OMNISCATR 1000 is a second generation of a new generation of high resolution three dimensional scatterometers. The instrument can acquire 200,000 three dimensional scatter data points with a dynamic range of 108. A description of OMNISCATR 1000 and its capabilities is presented. Data is also presented showing that the instrument's high speed data acquisition system has a measurement repeatability of 2.5%.
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Raymond J. Castonguay, Raymond J. Castonguay, Terry D. Ferguson, Terry D. Ferguson, "Accuracy and repeatability results of OMNISCATRTM: a high-speed, high-resolution three-dimensional scatterometer", Proc. SPIE 2260, Stray Radiation in Optical Systems III, (7 October 1994); doi: 10.1117/12.189205; https://doi.org/10.1117/12.189205
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