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19 October 1994 Precision cleaning using carbon dioxide jet spray
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Abstract
Traditional solvent-based precision cleaning methods are becoming increasingly unsatisfactory due to harsher environmental regulations and more stringent cleanliness requirements. The carbon dioxide (CO2) solid/gas jet spray cleaning technique is a superior, environmentally compatible, nonabrasive alternative cleaning technology. Experimental results demonstrating 100% removal of submicron-size particles and several types of molecular films from a variety of substrates are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Herbert C. Bitting "Precision cleaning using carbon dioxide jet spray", Proc. SPIE 2261, Optical System Contamination: Effects, Measurements, and Control IV, (19 October 1994); https://doi.org/10.1117/12.190155
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