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7 September 1994 Defect geometries and laser-induced damage in multilayer coatings
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Abstract
A correlation between laser-induced damage and the height of a coating defect was found from an examination of HfO2/SiO2 mirrors made by three different coating vendors. The nodular defects in these reactive e-beam deposited mirrors were studied using the combination of scanning electron microscopy (SEM), optical microscopy, focused ion beam (FIB) and atomic force microscopy (AFM) techniques. Each vendor has small defects in common, but characteristically different large defects. also the majority of seeds that caused the defects were made of hafnia, not silica. The apparent mechanical stability of the defects within the coating plays a major role in the laser resistance (1064 nm and 10 ns) of a high damage threshold coating.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert J. Tench, Mark R. Kozlowski, and Robert Chow "Defect geometries and laser-induced damage in multilayer coatings", Proc. SPIE 2262, Optical Thin Films IV: New Developments, (7 September 1994); https://doi.org/10.1117/12.185777
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