Indium tin oxide (ITO) coating of curved polymer substrates

Harold S. Gurev; Kim Jeffrey Bicking

doi:10.1117/12.185796

7 September 1994 Indium tin oxide (ITO) coating of curved polymer substrates

Harold S. Gurev, Kim Jeffrey Bicking

Proceedings Volume 2262, Optical Thin Films IV: New Developments; (1994) https://doi.org/10.1117/12.185796
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The need for transparent conductive coatings on plastic aircraft transparencies has produced significant improvements in low temperature indium tin oxide (ITO) coating technology as well as the control of sputter deposition uniformity across complex shapes. ITO coatings with bulk resistivity of 6.2 X 10^-4 ohm-cm, carrier concentration of 3.6 X 10²⁰ cm^-3 and mobility of 28 cm² V^-1s^-1 have been routinely produced on unheated polymer substrates. Transmission through the visible and near infrared can be tailored to each application by adjusting sputtering process parameters. While tuning transmission, care must be taken to maintain low resistivity by balancing carrier concentration and mobility. Techniques for coating thickness control by the relative motion of transparency and sputtering targets are discussed. The large scale production of low resistivity ITO coatings on temperature sensitive substrates will require careful attention to process control.

Citation Download Citation

Harold S. Gurev and Kim Jeffrey Bicking "Indium tin oxide (ITO) coating of curved polymer substrates", Proc. SPIE 2262, Optical Thin Films IV: New Developments, (7 September 1994); https://doi.org/10.1117/12.185796

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