7 September 1994 Indium tin oxide (ITO) coating of curved polymer substrates
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Abstract
The need for transparent conductive coatings on plastic aircraft transparencies has produced significant improvements in low temperature indium tin oxide (ITO) coating technology as well as the control of sputter deposition uniformity across complex shapes. ITO coatings with bulk resistivity of 6.2 X 10-4 ohm-cm, carrier concentration of 3.6 X 1020 cm-3 and mobility of 28 cm2 V-1s-1 have been routinely produced on unheated polymer substrates. Transmission through the visible and near infrared can be tailored to each application by adjusting sputtering process parameters. While tuning transmission, care must be taken to maintain low resistivity by balancing carrier concentration and mobility. Techniques for coating thickness control by the relative motion of transparency and sputtering targets are discussed. The large scale production of low resistivity ITO coatings on temperature sensitive substrates will require careful attention to process control.
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Harold S. Gurev, Harold S. Gurev, Kim Jeffrey Bicking, Kim Jeffrey Bicking, } "Indium tin oxide (ITO) coating of curved polymer substrates", Proc. SPIE 2262, Optical Thin Films IV: New Developments, (7 September 1994); doi: 10.1117/12.185796; https://doi.org/10.1117/12.185796
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