30 September 1994 Family of fiber based confocal and quasi-confocal microprobes
Author Affiliations +
Abstract
The basis of confocal microprobes, in general, is that light or other radiation is focused to a point where it is scattered by some material under study and then collected by a lens and detector system which is also focused on that point. The amount of radiation collected at the detector is then indicative of the scattering properties of the material at the common focus. This paper describes a family of related microprobes using optical fibers for delivering light to and from the focus. A novel arrangement is described wherein the focal points of the source and detector are not confocal but adjacent. This quasi-confocal arrangement has some very useful properties for detecting surfaces and investigating surface topography.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John A. Penkethman, John A. Penkethman, } "Family of fiber based confocal and quasi-confocal microprobes", Proc. SPIE 2263, Current Developments in Optical Design and Optical Engineering IV, (30 September 1994); doi: 10.1117/12.188017; https://doi.org/10.1117/12.188017
PROCEEDINGS
10 PAGES


SHARE
RELATED CONTENT

Picosecond time-resolved imaging using SPAD cameras
Proceedings of SPIE (October 25 2016)
Optical Detection Of Surface Flaws On Extruded Cables
Proceedings of SPIE (January 29 1985)
Distributed optical fiber sensors
Proceedings of SPIE (March 05 1993)
EUROSTEP 2000: New Steps In Wafer Steppers
Proceedings of SPIE (September 13 1982)

Back to Top