Principal surface approach as means of precise RMS-roughness estimation in noncontact profilometry

Hendrik Rothe; Angela Duparre; Andre Kasper

doi:10.1117/12.188001

30 September 1994 Principal surface approach as means of precise RMS-roughness estimation in noncontact profilometry

Hendrik Rothe, Angela Duparre, Andre Kasper

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Proceedings Volume 2263, Current Developments in Optical Design and Optical Engineering IV; (1994) https://doi.org/10.1117/12.188001
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

A commonly used estimator for the microtopography of a surface is its RMS-roughness. Raw surface profile data may contain trending components. Therefore they should be subjected to a detrending procedure before estimating the RMS-value. This procedure is limited in most cases to the removal of piston, slope and curvature. Consequently, undesired artifacts may arise, which negatively influence the precision of RMS-roughness estimation. In scanning surface metrology, the principal surface computed by using eigenvalues and eigenvectors of the covariance matrix of the surface data under consideration can be used for a robust and precise multivariate estimation of RMS-roughness.

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Hendrik Rothe, Angela Duparre, and Andre Kasper "Principal surface approach as means of precise RMS-roughness estimation in noncontact profilometry", Proc. SPIE 2263, Current Developments in Optical Design and Optical Engineering IV, (30 September 1994); https://doi.org/10.1117/12.188001

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