Methods of developing vibration and acoustic noise specifications for microelectronics process tools

Colin G. Gordon; Thomas L. Dresner

doi:10.1117/12.188863

4 October 1994 Methods of developing vibration and acoustic noise specifications for microelectronics process tools

Colin G. Gordon, Thomas L. Dresner

Proceedings Volume 2264, Vibration Monitoring and Control; (1994) https://doi.org/10.1117/12.188863
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The performance of optical tools used by the microelectronics industry is sensitive to their vibration and noise environments. Such environments result in internal tool vibrations that degrade tool performance. Relative vibrations between a tool and the workpiece on the order of only a few microinches per second can prevent the tool from successfully performing its task. Despite this, vendors often provide no specifications for allowable noise and vibration environments for their tools. In other cases, vendors provide allowable specifications that are incomplete, difficult to use, and/or hard to interpret for design-evaluation purposes. As a result, microelectronics facilities usually have to be designed very conservatively (and thus expensively) to assure acceptable tool performance. In this paper, we recommend simple test procedures that both vendors and users can implement to obtain useful specifications for allowable environments.

Citation Download Citation

Colin G. Gordon and Thomas L. Dresner "Methods of developing vibration and acoustic noise specifications for microelectronics process tools", Proc. SPIE 2264, Vibration Monitoring and Control, (4 October 1994); https://doi.org/10.1117/12.188863

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available