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14 September 1994 Fabrication of two-dimensional rough surfaces for light scattering and polarization measurements
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Abstract
The fabrication of characterized rough surfaces on photoresist is described. The technique used here can be separated into tow parts: first, a photoresist coating, generally 5 to 15 microns thick, is deposited on a flat glass substrate and baked in an oven; second, the plate is exposed, one line at a time, by a laser beam in a raster scanning method. Plate displacement is controlled by a PC computer in order to create the desired structure on the photoresist. Several deterministic and randomly rough gratings have been fabricated and characterized with a stylus profilometer.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michel A. Josse and Zu-Han Gu "Fabrication of two-dimensional rough surfaces for light scattering and polarization measurements", Proc. SPIE 2265, Polarization Analysis and Measurement II, (14 September 1994); https://doi.org/10.1117/12.186657
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