Epitaxial YBa2Cu3O7 superconducting infrared microbolometers on silicon

Burgess R. Johnson; Marc C. Foote; Holly A. Marsh; Brian D. Hunt

doi:10.1117/12.187475

23 September 1994 Epitaxial YBa₂Cu₃O₇ superconducting infrared microbolometers on silicon

Burgess R. Johnson, Marc C. Foote, Holly A. Marsh, Brian D. Hunt

Proceedings Volume 2267, Advanced Microdevices and Space Science Sensors; (1994) https://doi.org/10.1117/12.187475
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Superconducting transition-edge infrared microbolometers have been fabricated by silicon micromachining using an epitaxial YLa_.05Ba_1.95Cu₃O_7-x (YBCO) film on a epitaxial yttria-stabilized zirconia buffer layer on silicon. The low thermal conductance of the micromachined structures combined with the sharp resistance change at the superconducting transition results in very sensitive infrared detectors. The broadband response of these thermal detectors makes them particularly useful at wavelengths longer than the typical operating range of semiconductor detectors ((lambda) greater than about 20 micrometers ) at moderately high temperatures (T approximately 70 K and higher). The use of standard silicon processing promises low-cost monolithic integration of the readout electronics for arrays of these devices. Preliminary measurements are reported here on a device 140 micrometers X 105 micrometers in size with a detectivity, D*, of 8 +/- 2 X 10⁹ cm Hz^1/2/Watt, and NEP of 1.5 X 10^-12 Watts/Hz^1/2 at 2 Hz and 80.7 K. This value of D* exceeds the highest previously reported D* for a YBCO transition-edge bolometer, and is comparable to the highest reported D* for a thermal detector operating at greater than about 70 K. The thermal time constant for this device was 105 +/- 20 msec.

Citation Download Citation

Burgess R. Johnson, Marc C. Foote, Holly A. Marsh, and Brian D. Hunt "Epitaxial YBa₂Cu₃O₇ superconducting infrared microbolometers on silicon", Proc. SPIE 2267, Advanced Microdevices and Space Science Sensors, (23 September 1994); https://doi.org/10.1117/12.187475

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