Performance of uncooled semiconductor film bolometer infrared detectors

Mark H. Unewisse; Stephen J. Passmore; Kevin Charles Liddiard; Rodney J. Watson

doi:10.1117/12.188679

17 October 1994 Performance of uncooled semiconductor film bolometer infrared detectors

Mark H. Unewisse, Stephen J. Passmore, Kevin Charles Liddiard, Rodney J. Watson

Proceedings Volume 2269, Infrared Technology XX; (1994) https://doi.org/10.1117/12.188679
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

This paper describes a model for predicting the behavior of micro-machined thermal isolation structures that are employed in uncooled infrared detectors developed at the Defence Science and Technology Organisation (DSTO). The model forms the basis for calculations predicting the performance of semiconductor film microbolometers as infrared detectors. Performance predictions for a particular detector design are shown to be in good agreement with measured values. The effects of non-ohmic contacts and materials deposition techniques on noise, and hence on detector performance, are also discussed.

Citation Download Citation

Mark H. Unewisse, Stephen J. Passmore, Kevin Charles Liddiard, and Rodney J. Watson "Performance of uncooled semiconductor film bolometer infrared detectors", Proc. SPIE 2269, Infrared Technology XX, (17 October 1994); https://doi.org/10.1117/12.188679

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available