17 October 1994 Performance of uncooled semiconductor film bolometer infrared detectors
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Abstract
This paper describes a model for predicting the behavior of micro-machined thermal isolation structures that are employed in uncooled infrared detectors developed at the Defence Science and Technology Organisation (DSTO). The model forms the basis for calculations predicting the performance of semiconductor film microbolometers as infrared detectors. Performance predictions for a particular detector design are shown to be in good agreement with measured values. The effects of non-ohmic contacts and materials deposition techniques on noise, and hence on detector performance, are also discussed.
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Mark H. Unewisse, Mark H. Unewisse, Stephen J. Passmore, Stephen J. Passmore, Kevin Charles Liddiard, Kevin Charles Liddiard, Rodney J. Watson, Rodney J. Watson, "Performance of uncooled semiconductor film bolometer infrared detectors", Proc. SPIE 2269, Infrared Technology XX, (17 October 1994); doi: 10.1117/12.188679; https://doi.org/10.1117/12.188679
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