Numerical analysis for relief gratings working in the soft xray and XUV region by the integral equation method

Leonid I. Goray

doi:10.1117/12.180011

12 July 1994 Numerical analysis for relief gratings working in the soft x ray and XUV region by the integral equation method

Leonid I. Goray

Author Affiliations +

Proceedings Volume 2278, X-Ray and UV Detectors; (1994) https://doi.org/10.1117/12.180011
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Differential formalism gives a rapid convergence of accurate results even under conditions of propagation of several hundred spectral orders and grazing angles of incidence for the gratings with low groove-depth-to-groove-spacing ratio (h/d << 1) which are typical for this wavelength region. In the same way it was found that the rigorous results on the region of low (delta) /d ratios under the short time of computation may also be done through the modified integral method. By way of the programs created on the base of integral equations, the results done through the differential method were repeated and a good coincidence with them was found. These data allow us to speak about the equivalence of both methods -- integral and differential -- and about the convergence of algorithms.

Citation Download Citation

Leonid I. Goray "Numerical analysis for relief gratings working in the soft x ray and XUV region by the integral equation method", Proc. SPIE 2278, X-Ray and UV Detectors, (12 July 1994); https://doi.org/10.1117/12.180011

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