12 July 1994 Performances of ion-implanted CCDs in the EUV spectral region
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Abstract
The performance of a pair of thinned back-illuminated ion-implanted and laser annealed CCDs have been evaluated in the EUV spectral region. Both the devices have been manufactured by EEV and one of them was also treated with the new technique of anodic etching to improve its quantum efficiency. The measurements performed consist mainly of the determination of the CCD quantum efficiency in the 300 - 2500 angstrom region. These tests have been performed by means of a new vacuum test facility and a new CCd controller realized in our laboratories which is interfaced with a PC; moreover, to have a low noise, both the CCDs have worked in a slow scan mode and have been cryogenically cooled. The results show that a CCD quantum efficiency decreasing during the tests is present, but demonstrate also that these devices can have a lot of capabilities as EUV detectors.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Giampiero Naletto, Emanuele Pace, Giuseppe Tondello, Alessio Boscolo, Giovanni Bonanno, "Performances of ion-implanted CCDs in the EUV spectral region", Proc. SPIE 2278, X-Ray and UV Detectors, (12 July 1994); doi: 10.1117/12.180004; https://doi.org/10.1117/12.180004
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