12 July 1994 Performances of ion-implanted CCDs in the EUV spectral region
Author Affiliations +
Abstract
The performance of a pair of thinned back-illuminated ion-implanted and laser annealed CCDs have been evaluated in the EUV spectral region. Both the devices have been manufactured by EEV and one of them was also treated with the new technique of anodic etching to improve its quantum efficiency. The measurements performed consist mainly of the determination of the CCD quantum efficiency in the 300 - 2500 angstrom region. These tests have been performed by means of a new vacuum test facility and a new CCd controller realized in our laboratories which is interfaced with a PC; moreover, to have a low noise, both the CCDs have worked in a slow scan mode and have been cryogenically cooled. The results show that a CCD quantum efficiency decreasing during the tests is present, but demonstrate also that these devices can have a lot of capabilities as EUV detectors.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Giampiero Naletto, Giampiero Naletto, Emanuele Pace, Emanuele Pace, Giuseppe Tondello, Giuseppe Tondello, Alessio Boscolo, Alessio Boscolo, Giovanni Bonanno, Giovanni Bonanno, } "Performances of ion-implanted CCDs in the EUV spectral region", Proc. SPIE 2278, X-Ray and UV Detectors, (12 July 1994); doi: 10.1117/12.180004; https://doi.org/10.1117/12.180004
PROCEEDINGS
10 PAGES


SHARE
RELATED CONTENT

Characterization of the CCDs for the Joint European X Ray...
Proceedings of SPIE (November 10 1994)
Performances of a CCD camera from 1 to 1100...
Proceedings of SPIE (September 24 1997)
Multilayer x-ray-sensitive CCDs
Proceedings of SPIE (April 29 2002)
Progress in soft x-ray and UV photocathodes
Proceedings of SPIE (October 30 1996)

Back to Top