11 November 1994 Fabrication and synchrotron measurements of Be-based multilayer x-ray mirrors
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A first attempt to fabricate high reflectivity W/Be and Mo/Be multilayer mirror coatings for near normal incidence and grazing angle applications is reported. Forty layers each of W and Be were laid down alternatively on super polished fused silica substrates by sputter deposition with layer thicknesses of 16 angstroms and 40 angstroms, respectively and a 80 angstroms thick Be capping layer. Soft x-ray reflectivity measurements were carried out using the NRL reflectometer at the Brookhaven National Synchronous Light Source. Measurements at two grazing angles and photon energies yielded the following peak reflectivities: 14.3% (at 14.68 degree(s) and 439 eV) and 7.5% (at 20.2 degree(s) and 307 eV). Model peak calculations taking into account interlay roughness indicate layer roughness of 5.4 angstroms (rms) and a BeO thickness of 70 angstroms in the Be capping layer. In an attempt to reduce interlayer roughness and/or intermixing by reducing the bombardment of high energy Ar neutrals on the growing layers, experiments are underway to replace Ar as the sputter gas with Xe for the W/Be multilayer coatings.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jack C. Rife, Jack C. Rife, Brian W. Murray, Brian W. Murray, Syen B. Qadri, Syen B. Qadri, William R. Hunter, William R. Hunter, } "Fabrication and synchrotron measurements of Be-based multilayer x-ray mirrors", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193150; https://doi.org/10.1117/12.193150

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