Grazing incidence mirror for a new microspectroscope using soft x-ray undulator radiation

Markus R. Weiss; V. Wuestenhagen; E. Umbach

doi:10.1117/12.193127

11 November 1994 Grazing incidence mirror for a new microspectroscope using soft x-ray undulator radiation

Markus R. Weiss, V. Wuestenhagen, E. Umbach

Proceedings Volume 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics; (1994) https://doi.org/10.1117/12.193127
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The paper describes a concept to improve the present photon-induced scanning Auger- microscope, a high-flux micro-spectroscope which allows electron spectroscopy with high spatial resolution, in-situ chemical mapping, and microstructuring of organic and organometallic compounds. It utilizes high-brightness, quasi-monochromatic undulator radiation from BESSY storage ring. The present electron energy resolution (>= 0.5 eV) appears sufficient but the spatial resolution (>= 3 micrometers ) can be significantly improved. The new concept compromises grazing incidence optics in a two stage reduction scheme in order to combine an increase of photon flux with an increase of the spatial resolution to 0.2 micrometers . The key component of the improved instrument is an ellipsoidal grazing incidence mirror for which optimization calculations have been performed. These include diffraction, surface roughness and slope errors as well as manufactural limitations taking technical realizability into account.

Citation Download Citation

Markus R. Weiss, V. Wuestenhagen, and E. Umbach "Grazing incidence mirror for a new microspectroscope using soft x-ray undulator radiation", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); https://doi.org/10.1117/12.193127

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