11 November 1994 Grazing incidence mirror for a new microspectroscope using soft x-ray undulator radiation
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The paper describes a concept to improve the present photon-induced scanning Auger- microscope, a high-flux micro-spectroscope which allows electron spectroscopy with high spatial resolution, in-situ chemical mapping, and microstructuring of organic and organometallic compounds. It utilizes high-brightness, quasi-monochromatic undulator radiation from BESSY storage ring. The present electron energy resolution (>= 0.5 eV) appears sufficient but the spatial resolution (>= 3 micrometers ) can be significantly improved. The new concept compromises grazing incidence optics in a two stage reduction scheme in order to combine an increase of photon flux with an increase of the spatial resolution to 0.2 micrometers . The key component of the improved instrument is an ellipsoidal grazing incidence mirror for which optimization calculations have been performed. These include diffraction, surface roughness and slope errors as well as manufactural limitations taking technical realizability into account.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Markus R. Weiss, Markus R. Weiss, V. Wuestenhagen, V. Wuestenhagen, E. Umbach, E. Umbach, } "Grazing incidence mirror for a new microspectroscope using soft x-ray undulator radiation", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193127; https://doi.org/10.1117/12.193127


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