11 November 1994 Optical behavior determination of thin film and bulk materials in the x-ray region
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Abstract
Optical constant determination of thin films is critical to the design of x-ray multilayers. In the x-ray region, surface roughness, interfacial roughness, interdiffusion, volume anisotropics, etc. all act to reduce the reflection. A method is described to include all imperfections that make a real film different from an ideal film into the `optical behavior' values for each individual layer and the multilayer as a whole. These `optical behavior' values can then be used to accurately predict the performance of the multilayer.
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Michele M. Wilson, Michele M. Wilson, Muamer Zukic, Muamer Zukic, Douglas G. Torr, Douglas G. Torr, Alphonsus John Fennelly, Alphonsus John Fennelly, Edward L. Fry, Edward L. Fry, } "Optical behavior determination of thin film and bulk materials in the x-ray region", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193131; https://doi.org/10.1117/12.193131
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