Soft x-ray reflectometer for large and complex samples using synchrotron radiation

Detlef Fuchs; Michael K. Krumrey; Thomas Lederer; Peter Mueller; Frank Scholze; Gerhard Ulm

doi:10.1117/12.193157

11 November 1994 Soft x-ray reflectometer for large and complex samples using synchrotron radiation

Detlef Fuchs, Michael K. Krumrey, Thomas Lederer, Peter Mueller, Frank Scholze, Gerhard Ulm

Proceedings Volume 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics; (1994) https://doi.org/10.1117/12.193157
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

At the radiometry laboratory of the Physikalisch-Technische Bundesanstalt a reflectometer for the soft x-ray spectral region is operated for several years utilizing monochromatic radiation from a toroidal grating monochromator or from a high resolution plane grating monochromator. The monochromators cover the photon energy region from 35 eV to 1500 eV. New challenges due to the development of soft x-ray optical components led to the design of a second reflectometer with advanced capabilities. Samples with a diameter of up to 250 mm can be accommodated. The time required for sample exchange is reduced by using a lock chamber. The feasibility of sample positioning with high precision has been improved. Typical uncertainties in the order of 1 - 2%, e.g. for the reflectance of multilayer mirrors, can be achieved. A detailed description of the reflectometer as well as some typical results showing the performance are presented.

Citation Download Citation

Detlef Fuchs, Michael K. Krumrey, Thomas Lederer, Peter Mueller, Frank Scholze, and Gerhard Ulm "Soft x-ray reflectometer for large and complex samples using synchrotron radiation", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); https://doi.org/10.1117/12.193157

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