11 November 1994 Soft x-ray reflectometer for large and complex samples using synchrotron radiation
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Abstract
At the radiometry laboratory of the Physikalisch-Technische Bundesanstalt a reflectometer for the soft x-ray spectral region is operated for several years utilizing monochromatic radiation from a toroidal grating monochromator or from a high resolution plane grating monochromator. The monochromators cover the photon energy region from 35 eV to 1500 eV. New challenges due to the development of soft x-ray optical components led to the design of a second reflectometer with advanced capabilities. Samples with a diameter of up to 250 mm can be accommodated. The time required for sample exchange is reduced by using a lock chamber. The feasibility of sample positioning with high precision has been improved. Typical uncertainties in the order of 1 - 2%, e.g. for the reflectance of multilayer mirrors, can be achieved. A detailed description of the reflectometer as well as some typical results showing the performance are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Detlef Fuchs, Michael K. Krumrey, Thomas Lederer, Peter Mueller, Frank Scholze, Gerhard Ulm, "Soft x-ray reflectometer for large and complex samples using synchrotron radiation", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193157; https://doi.org/10.1117/12.193157
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