11 November 1994 Soft x-ray reflectometer for large and complex samples using synchrotron radiation
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At the radiometry laboratory of the Physikalisch-Technische Bundesanstalt a reflectometer for the soft x-ray spectral region is operated for several years utilizing monochromatic radiation from a toroidal grating monochromator or from a high resolution plane grating monochromator. The monochromators cover the photon energy region from 35 eV to 1500 eV. New challenges due to the development of soft x-ray optical components led to the design of a second reflectometer with advanced capabilities. Samples with a diameter of up to 250 mm can be accommodated. The time required for sample exchange is reduced by using a lock chamber. The feasibility of sample positioning with high precision has been improved. Typical uncertainties in the order of 1 - 2%, e.g. for the reflectance of multilayer mirrors, can be achieved. A detailed description of the reflectometer as well as some typical results showing the performance are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Detlef Fuchs, Detlef Fuchs, Michael K. Krumrey, Michael K. Krumrey, Thomas Lederer, Thomas Lederer, Peter Mueller, Peter Mueller, Frank Scholze, Frank Scholze, Gerhard Ulm, Gerhard Ulm, } "Soft x-ray reflectometer for large and complex samples using synchrotron radiation", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193157; https://doi.org/10.1117/12.193157

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