11 November 1994 Time stability of multilayer reflectivity
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Various multilayers have been fabricated and analyzed in our laboratory over the past six years. We report effects of aging on the reflectivities of these multilayers. Several mechanisms can cause changes in multilayer performance: surface contamination, inter-layer diffusion, oxidation. We seek to study these mechanisms by modeling the measured performance with a multilayer computational code. A majority of our multilayers are Molybdenum-Silicon structures. We also have measurements on several Tungsten-Carbon multilayers, in which variations in effective 2d spacing are more readily determined because of their narrow passbands.
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Lawrence Shing, Lawrence Shing, Richard C. Catura, Richard C. Catura, } "Time stability of multilayer reflectivity", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193137; https://doi.org/10.1117/12.193137


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