Solution chemistry techniques are of interest for the deposition of thin film planar waveguides due to the ease of fabrication, the compositional range available, and the routine synthesis of guides with losses < 0.5 dB ((lambda) equals 632.8 nm). In this work, the wavelength dependence and attenuation of sol-gel waveguides were measured as a function of composition and time in storage, or aging. The compositions investigated in this work were (in mole %) 65SiO2:35TiO2, 50SiO2:50TiO2 and 41.5SiO2:41.5TiO2:17Al2O3 waveguides. Initial losses of the waveguides were < 0.5 dB/cm ((lambda) equals 632.8 nm). The initial wavelength dependence of the guides was also measured. In waveguides where the losses are intrinsically or Rayleigh scatter limited, a dependence of (lambda) 4 is expected. However, the wavelength dependence measured for the sol-gel guides varied with composition. After periods in storage, waveguide attenuation was remeasured, and the guides were found to have deteriorated, with higher losses. The rate of deterioration varied with composition. Possible causes of the deterioration of the guides are presented and discussed.