Modification of sol-gel coatings by ion implantation

Hiroshi Hirashima; Kenji Adachi; Hiroaki Imai

doi:10.1117/12.188968

13 October 1994 Modification of sol-gel coatings by ion implantation

Hiroshi Hirashima, Kenji Adachi, Hiroaki Imai

Proceedings Volume 2288, Sol-Gel Optics III; (1994) https://doi.org/10.1117/12.188968
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

In order to densify and to improve the physical properties, TiO₂ sol-gel films, about 100 nm in thickness, on silica glass or silicon wafer were implanted with Ar⁺ or B⁺ ions. The refractive index of the as-dried films increased and the IR absorption band of OH disappeared after Ar⁺ implantation. Dehydration and densification of sol-gel films were enhanced by Ar⁺ implantation. On the other hand, the refractive index and the thickness of the films hardly changed by B⁺ implantation. However, IR absorption bands attributed to B-O bond were observed after B⁺ implantation. This suggests that sol-gel films could be chemically modified by ion implantation with reactive ion species.

Citation Download Citation

Hiroshi Hirashima, Kenji Adachi, and Hiroaki Imai "Modification of sol-gel coatings by ion implantation", Proc. SPIE 2288, Sol-Gel Optics III, (13 October 1994); https://doi.org/10.1117/12.188968

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