21 October 1994 Integrated optical interferometer with micromechanical diaphragm for pressure sensing
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An electrically passive optical pressure sensor has been fabricated which uses a integrated-optical Y-junction ring resonator to measure the strain induced in a micromachined silicon diaphragm. A silicon substrate is etched from the side opposite the silicon oxynitride optical waveguides to produce a rectangular diaphragm whose long edge lies underneath a straight section in the ring. Pressure-induced changes in the resonant frequency of the ring are measured using a frequency swept laser diode. A linear response to pressure is observed for the TM mode with a sensitivity of 0.0094 rad/kPa. The transmissivity function of the resonator is derived and compared with measured response. This pressure sensor is rugged, amenable to batch fabrication, and it provides a link insensitive readout.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gregory N. De Brabander, Gregory N. De Brabander, Joseph T. Boyd, Joseph T. Boyd, Glenn Beheim, Glenn Beheim, } "Integrated optical interferometer with micromechanical diaphragm for pressure sensing", Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); doi: 10.1117/12.190902; https://doi.org/10.1117/12.190902

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