21 October 1994 Micromachined free-space integrated optics
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We report a novel surface-micromachined micro-optical bench (MOB) technology which enables us to monolithically integrate 'flipped-up' free-space optical elements with micro-positioners and micro- actuators. This technology allows complete optical systems be implemented on a single Si chip using IC-like microfabrication processes. We have, for the first time, successfully fabricated micro-Fresnel lenses, mirrors, beam-splitters, gratings, and precision optical mounts, as well as rotational stages and other micro- positioners. Self-aligned hybrid integration with edge-emitting lasers and vertical cavity surface-emitting lasers (VCSEL) are also demonstrated for the first time. The MOB technology could significantly reduce the size, weight, and cost of most optical systems, and has a significant impact on optical switching, optical data storage, optoelectronic packaging.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ming C. Wu, Lih-Yuan Lin, Shi-sheng Lee, "Micromachined free-space integrated optics", Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); doi: 10.1117/12.190929; https://doi.org/10.1117/12.190929

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