5 August 1994 Measurement error caused by white-light spectrum in fringe scanning interferometry
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Proceedings Volume 2321, Second International Conference on Optoelectronic Science and Engineering '94; (1994) https://doi.org/10.1117/12.182164
Event: Optoelectronic Science and Engineering '94: International Conference, 1994, Beijing, China
Abstract
The measurement error caused by white-light spectrum in fringe scanning interferometry is a principle error. This paper presents the analysis of the error and results of computer simulation, which shows that the error is about 20% of measured phase and could not be ignored. Since the error is about linear, the compensation is simply to multiply a constant coefficient.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiabi Chen, Jiabi Chen, Bichun Zhou, Bichun Zhou, } "Measurement error caused by white-light spectrum in fringe scanning interferometry", Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); doi: 10.1117/12.182164; https://doi.org/10.1117/12.182164
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