Precision laser scribing machine

Yongzheng Li; Qiu'e Zhang

doi:10.1117/12.182080

5 August 1994 Precision laser scribing machine

Yongzheng Li, Qiu'e Zhang

Proceedings Volume 2321, Second International Conference on Optoelectronic Science and Engineering '94; (1994) https://doi.org/10.1117/12.182080
Event: Optoelectronic Science and Engineering '94: International Conference, 1994, Beijing, China

Abstract

In this paper we describe a new high precision laser scribing machine. The platform of this machine is driven by a servo motor controlled with an photoelectric coder and computer. With a predetermined laser beam axis angle (equal to 25 degree(s)) to the normal line of the workpiece's surface, the laser beam axis is always quasi-perpendicular to the surface of the workpiece being scribed. We can obtain scribing line of apparently different thickness by changing the dot density without changing the defocusing. We have also developed a new technique to double the laser pulse repetition rate, etc.

Citation Download Citation

Yongzheng Li and Qiu'e Zhang "Precision laser scribing machine", Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); https://doi.org/10.1117/12.182080

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