5 August 1994 Precision laser scribing machine
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Proceedings Volume 2321, Second International Conference on Optoelectronic Science and Engineering '94; (1994) https://doi.org/10.1117/12.182080
Event: Optoelectronic Science and Engineering '94: International Conference, 1994, Beijing, China
Abstract
In this paper we describe a new high precision laser scribing machine. The platform of this machine is driven by a servo motor controlled with an photoelectric coder and computer. With a predetermined laser beam axis angle (equal to 25 degree(s)) to the normal line of the workpiece's surface, the laser beam axis is always quasi-perpendicular to the surface of the workpiece being scribed. We can obtain scribing line of apparently different thickness by changing the dot density without changing the defocusing. We have also developed a new technique to double the laser pulse repetition rate, etc.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongzheng Li, Qiu'e Zhang, "Precision laser scribing machine", Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); doi: 10.1117/12.182080; https://doi.org/10.1117/12.182080
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