5 August 1994 Study of the fabrication of microlenses by laser chemical vapor deposition
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Proceedings Volume 2321, Second International Conference on Optoelectronic Science and Engineering '94; (1994) https://doi.org/10.1117/12.182144
Event: Optoelectronic Science and Engineering '94: International Conference, 1994, Beijing, China
Abstract
In this paper, a method of investigating a produce silicon-nitride microlenses with the thickness profile of spherical shape on flat quartz substrate by laser chemical vapor deposition (Laser CVD) was introduced. The results of tests indicated that the spherical microlenses with smooth surface were fabricated through regulating laser power, illumination time, concentration and mixture ratio of source gases.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huizhen Yao, Guorui Song, Zhonggang Jiang, "Study of the fabrication of microlenses by laser chemical vapor deposition", Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); doi: 10.1117/12.182144; https://doi.org/10.1117/12.182144
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