12 December 1994 Laser processing of Y1Ba2Cu3O7 superconducting thin films
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Proceedings Volume 2332, Second International Symposium on Advanced Laser Technologies; (1994) https://doi.org/10.1117/12.195889
Event: Advanced Laser Technologies: International Symposium, 1993, Prague, Czech Republic
Superconducting Y1Ba2Cu3O7 thin films were prepared by in-situ oxygen plasma-assisted laser deposition. It was revealed that cw CO2 laser heating of substrate surface may be a method for reduction of particulate density. The buffer layers such as Ba(Sr)TiO3 and YSZ(111) were successfully experimented for preparation of good superconducting thin films. A multistep superfast CO2 laser annealing was investigated as a method of modification of the Y1Ba2Co3O7 thin films on Si. It is shown that N2 laser ablation may be a proper technique for patterning Y1Ba2Cu3O7 thin films. The films were characterized by EDAX, SEM, XRD and Raman spectroscopy.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter A. Atanasov, Peter A. Atanasov, Rumen I. Tomov, Rumen I. Tomov, Valery S. Serbezov, Valery S. Serbezov, } "Laser processing of Y1Ba2Cu3O7 superconducting thin films", Proc. SPIE 2332, Second International Symposium on Advanced Laser Technologies, (12 December 1994); doi: 10.1117/12.195889; https://doi.org/10.1117/12.195889

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